BF3-11 isotope Boron trichloride 11 isotope Gas

Boron trichloride 11 (B11Cl3) is a colorless fuming gas at room temperature and pressure, combustible, irritating, acidic odor, decomposes into hydrogen chloride and boric acid when it meets water and emits a large amount of heat, and generates fumes due to hydrolysis in the humid air, and decomposes into hydrochloric acid and borate ester in alcohol. Boron trichloride 11 has strong reactivity, can form a variety of coordination compounds, boron trichloride heating and glass, ceramics and reaction, but also with many organic matter reaction to form a variety of organic boron compounds. High purity boron trichloride 11 is mainly used for (silicon) semiconductor device manufacturing process of diffusion doping, at high temperatures, after the decomposition of boron impurities generated by the diffusion of silicon, the formation of P-type semiconductors, but also can be used for Al, MoSi2, TaSi2, TiSi2, WSi and other materials such as dry etching.